REACTIVELY SPUTTERED TANTALUM THIN FILM RESISTORS .1. PHYSICAL AND ELECTRICAL PROPERTIES

被引：20

作者：

HARDY, WR

SHEWCHUN, J

KUENZIG, D

TAM, C

机构：

来源：

THIN SOLID FILMS | 1971年 / 8卷 / 02期

关键词：

D O I：

10.1016/0040-6090(71)90001-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：81 / &

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