ELLIPSOMETRIC TECHNIQUE FOR OBTAINING SUBSTRATE OPTICAL CONSTANTS

被引：42

作者：

SHEWCHUN, J

ROWE, EC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1970年 / 41卷 / 10期

关键词：

D O I：

10.1063/1.1658424

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4128 / &

共 22 条

[1] ELLIPSOMETRY WITH NON-IDEAL COMPENSATORS [J].

ARCHER, RJ ;

SHANK, CV .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (02) :191-&

[2] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].

ARCHER, RJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&

[3] EFFECT OF THIN SURFACE FILM ON ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS [J].

BURGE, DK ;

BENNETT, HE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1964, 54 (12) :1428-&

[4]

Drude P., 1889, ANN PHYS-NEW YORK, V272, P865

[5] OPTICAL CONSTANTS AND REFLECTANCE AND TRANSMITTANCE OF EVAPORATED ALUMINUM IN VISIBLE AND ULTRAVIOLET [J].

HASS, G ;

WAYLONIS, JE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1961, 51 (07) :719-&

[6] FORMULAS FOR USING WAVE PLATES IN ELLIPSOMETRY [J].

HOLMES, DA ;

FEUCHT, DL .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1967, 57 (04) :466-+

[7] ANODIZATION OF VANADIUM IN ACETIC ACID SOLUTIONS [J].

KEIL, RG ;

SALOMON, RE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (06) :628-&

[8] An optical investigation of oxide films on metals [J].

Leberknight, CE ;

Lustman, B .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1939, 29 (02) :59-66

[9]

MCCRACKIN FL, 1969, 479 NAT BUR STD US T

[10]

PARTINGTON JR, 1953, ADVANCED TREATISE PH, V4, P506

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