NON-SPECULAR X-RAY-SCATTERING FROM THIN-FILMS AND MULTILAYERS WITH SMALL-ANGLE SCATTERING EQUIPMENT

被引：42

作者：

SALDITT, T ^{[1
]}

METZGER, TH ^{[1
]}

PEISL, J ^{[1
]}

GOERIGK, G ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM,INST FESTKORPERFORSCH,D-52425 JULICH,GERMANY

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 4A期

关键词：

D O I：

10.1088/0022-3727/28/4A/046

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present measurements of non-specular x-ray scattering from rough interfaces at a dedicated small-angle scattering beamline that allows for very low divergence of the incident beam and therefore for high resolution close to the specularly reflected beam. A two-dimensional detector is used to measure the non-specular intensity both in and out of the plane of reflection. The method is exemplified by an Au single layer, an amorphous Nb/Al2O3 multilayer and an epitaxial GaAs/AlAs superlattice sample.

引用

页码：A236 / A240

页数：5

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