X-RAY TEXTURE ANALYSIS OF THIN-FILMS BY THE REFLECTION METHOD - INTERMEDIATE REGIME IN DEFOCUSING CORRECTIONS

被引:4
作者
CHATEIGNER, D
GERMI, P
PERNET, M
机构
[1] Cent Natl de la Recherche, Scientifique, Grenoble
关键词
D O I
10.1107/S0021889893008611
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This paper gives the angular domains of validity for corrections of experimental data obtained from the texture analysis of thin films, multilayers and covered substrates by the Schulz reflection technique. The behaviours of defocusing curves versus material constants are given as examples and their effects on correction curves are shown. The correction formulas for characteristic types of multilayers are also deduced and are illustrated for one example.
引用
收藏
页码:278 / 282
页数:5
相关论文
共 7 条
[1]   TEXTURE ANALYSIS BY THE SCHULZ REFLECTION METHOD - DEFOCALIZATION CORRECTIONS FOR THIN-FILMS [J].
CHATEIGNER, D ;
GERMI, P ;
PERNET, M .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1992, 25 :766-769
[2]   DEFOCUSING PHENOMENON CONNECTED WITH GEOMETRY OF SCHULZ TEXTURE CHAMBER AND INCIDENCE ON MEASURED INTENSITY [J].
COUTERNE, JC ;
CIZERON, G .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1971, 4 (DEC1) :461-&
[3]   INFLUENCE OF INSTRUMENTAL ABERRATIONS ON THE SCHULTZ TECHNIQUE FOR THE MEASUREMENT OF POLE FIGURES [J].
GALE, B ;
GRIFFITHS, D .
BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (03) :96-102
[4]  
RELLER A, 1989, 40159 INT CTR DIFF D
[6]   DEFOCUSING FOR SCHULZ TECHNIQUE OF DETERMINING PREFERRED ORIENTATION [J].
TENCKHOFF, E .
JOURNAL OF APPLIED PHYSICS, 1970, 41 (10) :3944-+
[7]   TEXTURE ANALYSIS OF POLYCRYSTALLINE SILICON FILMS [J].
WENK, HR ;
SINTUBIN, M ;
HUANG, J ;
JOHNSON, GC ;
HOWE, RT .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (01) :572-574