THE INTERFACES A-SI-H/PD AND A-SI-H ITO - STRUCTURE AND ELECTRONIC-PROPERTIES

被引:6
作者
HOHEISEL, M
BRUTSCHER, N
OPPOLZER, H
SCHILD, S
机构
关键词
D O I
10.1016/0022-3093(87)90231-6
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:959 / 962
页数:4
相关论文
共 7 条
[1]  
BRUTSCHER N, IN PRESS SOLID ST EL
[2]   THE GROWTH OF THIN OXIDES ON A-SI AND A-SI-H IN AN O2 PLASMA [J].
COLLINS, RW ;
TUCKERMAN, CJ ;
HUANG, CY ;
WINDISCHMANN, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2077-2081
[3]   PHYSICAL ASPECTS OF A-SI-H IMAGE SENSORS [J].
HOHEISEL, M ;
BRUNST, G ;
WIECZOREK, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 90 (1-3) :243-246
[4]   CHARACTERIZATION OF JUNCTIONS BETWEEN TRANSPARENT ELECTRODES AND A-SI-H [J].
HOHEISEL, M ;
WECZOREK, H ;
KEMPTER, K .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 :1413-1416
[5]  
Kempter K., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V617, P120, DOI 10.1117/12.961081
[6]   INTERFACE KINETICS AT METAL CONTACTS ON A-SI-H [J].
NEMANICH, RJ ;
THOMPSON, MJ ;
JACKSON, WB ;
TSAI, CC ;
STAFFORD, BL .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :513-516
[7]  
OZAWA T, 1985, MATER RES SOC S P, V49, P417