共 7 条
[1]
BRUTSCHER N, IN PRESS SOLID ST EL
[2]
THE GROWTH OF THIN OXIDES ON A-SI AND A-SI-H IN AN O2 PLASMA
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1985, 3 (06)
:2077-2081
[5]
Kempter K., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V617, P120, DOI 10.1117/12.961081
[7]
OZAWA T, 1985, MATER RES SOC S P, V49, P417