COMBINED EFFECTS OF FE AND H-2 ON KINETICS OF SILICON NITRIDATION

被引：20

作者：

DAWSON, WM

MOULSON, AJ

机构：

来源：

关键词：

D O I：

10.1007/BF00541693

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2289 / 2290

页数：2

共 12 条

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ATKINSON, A ;

MOULSON, AJ ;

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[2]

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[3]

Boyer S.M., 1977, NITROGEN CERAMICS, P297

[4] MECHANISM FOR NITRIDATION OF FE-CONTAMINATED SILICON [J].

BOYER, SM ;

MOULSON, AJ .

[5]

CAMPOSLORIZ D, 1976, THESIS LEEDS U

[6]

Elias D. P., 1976, Powder Metallurgy International, V8, P162

[7] MASS-SPECTROMETRIC STUDIES OF NITRIDATION OF SILICON [J].

LIN, SS .

MANGELS, JA .

[9]

MOULSON AJ, UNPUBLISHED

[10]

PARR NL, 1967, P BRIT CERAMIC SOC, V7, P81