RESIDUAL STRAINS OF PB THIN-FILMS DEPOSITED ONTO SI SUBSTRATES

被引：71

作者：

MURAKAMI, M

机构：

来源：

ACTA METALLURGICA | 1978年 / 26卷 / 01期

关键词：

D O I：

10.1016/0001-6160(78)90214-6

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

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页码：175 / 183

页数：9

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