共 38 条
[1]
ABRAMOWITZ M, 1970, APPL MATH SERIES, V55, P358
[2]
ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:883-893
[6]
BURKE RR, 1988, SOLID STATE TECHNOL, V31, P67
[9]
PLASMA CHARACTERIZATION FOR A DIVERGENT FIELD ELECTRON-CYCLOTRON RESONANCE SOURCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:899-902
[10]
COMPARISON OF EXPERIMENTAL MEASUREMENTS AND MODEL PREDICTIONS FOR RADIO-FREQUENCY AR DISCHARGES AND SF6 DISCHARGES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:1001-1006