CHARACTERIZATION OF REACTIVELY EVAPORATED SIOX THIN-FILMS

被引:23
作者
OLEARY, MJ [1 ]
THOMAS, JH [1 ]
机构
[1] RCA LABS,DAVID SARNOFF RES CTR,PRINCETON,NJ 08543
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期
关键词
D O I
10.1116/1.574142
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:106 / 109
页数:4
相关论文
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