ION RANGE DISTRIBUTIONS IN MULTILAYERED STRUCTURES - BI IN SI/GE

[1] [Anonymous], 1985, SYNTHETIC MODULATED

[2] APPLETON BR, 1984, MATER RES SOC S P, V27, P195

[3] STRAINED-LAYER EPITAXY OF GERMANIUM-SILICON ALLOYS [J]. SCIENCE, 1985, 230 (4722) : 127 - 131

[4] ION-IMPLANTATION DISTRIBUTIONS IN INHOMOGENEOUS MATERIALS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (04) : 289 - 299

[5] COMBASSON JL, 1973, P INT C ION IMPLANTA, P285

[6] BACKSCATTERING MEASUREMENTS OF IMPLANTED ION DISTRIBUTIONS IN DOUBLE-LAYER STRUCTURES [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) : 4729 - 4734

[7] ENERGY DISSIPATION BY IONS IN KEV REGION [J]. PHYSICAL REVIEW, 1961, 124 (01): : 128 - +

[8] EFFECTS OF SI/GE MULTILAYERED STRUCTURES ON BI PROJECTED RANGE DISTRIBUTIONS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 21 - 24

[9] SMITH DH, 1977, ION IMPLANTATION SEM, P333

[10] Williams J.S., 1984, MATER RES SOC S P, V27, P205

[1] [Anonymous], 1985, SYNTHETIC MODULATED

[2] APPLETON BR, 1984, MATER RES SOC S P, V27, P195

[3] STRAINED-LAYER EPITAXY OF GERMANIUM-SILICON ALLOYS [J]. SCIENCE, 1985, 230 (4722) : 127 - 131

[4] ION-IMPLANTATION DISTRIBUTIONS IN INHOMOGENEOUS MATERIALS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (04) : 289 - 299

[5] COMBASSON JL, 1973, P INT C ION IMPLANTA, P285

[6] BACKSCATTERING MEASUREMENTS OF IMPLANTED ION DISTRIBUTIONS IN DOUBLE-LAYER STRUCTURES [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (09) : 4729 - 4734

[7] ENERGY DISSIPATION BY IONS IN KEV REGION [J]. PHYSICAL REVIEW, 1961, 124 (01): : 128 - +

[8] EFFECTS OF SI/GE MULTILAYERED STRUCTURES ON BI PROJECTED RANGE DISTRIBUTIONS [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 21 - 24

[9] SMITH DH, 1977, ION IMPLANTATION SEM, P333

[10] Williams J.S., 1984, MATER RES SOC S P, V27, P205