EFFECTS OF SI/GE MULTILAYERED STRUCTURES ON BI PROJECTED RANGE DISTRIBUTIONS

被引：7

作者：

PICRAUX, ST

TSAO, JY

BRICE, DK

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80007-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：21 / 24

页数：4

共 9 条

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Chang L.L., 1985, SYNTHETIC MODULATED

[7] BACKSCATTERING MEASUREMENTS OF IMPLANTED ION DISTRIBUTIONS IN DOUBLE-LAYER STRUCTURES [J].

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[8] ION-IMPLANTATION DISTRIBUTIONS IN INHOMOGENEOUS MATERIALS [J].

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APPLIED PHYSICS LETTERS, 1977, 31 (10) :649-651

[9]

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