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INSITU DC OXYGEN-DISCHARGE CLEANING SYSTEM FOR OPTICAL-ELEMENTS

被引：15
作者：
KOIDE, T
SHIDARA, T
TANAKA, K
YAGISHITA, A
SATO, S
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1140869
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：2034 / 2037
页数：4
相关论文
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