DECOMPOSITION OF TRIMETHYLGALLIUM ON SI(100) - SPECTROSCOPIC IDENTIFICATION OF THE INTERMEDIATES

被引：62

作者：

LEE, F ^{[1
]}

BACKMAN, AL ^{[1
]}

LIN, R ^{[1
]}

GOW, TR ^{[1
]}

MASEL, RI ^{[1
]}

机构：

[1] UNIV ILLINOIS,1209 W CALIF ST,URBANA,IL 61801

来源：

关键词：

D O I：

10.1016/0039-6028(89)90651-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：173 / 188

页数：16

共 17 条

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