IMPROVED PROPERTIES OF TAN-TA2O5NX-AL CAPACITORS

被引：6

作者：

REDDY, PK

JAWALEKAR, SR

机构：

[1] Department of Electrical Engineering, Indian Institute of Technology, Bombay

来源：

THIN SOLID FILMS | 1979年 / 64卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90546-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The properties of TaNTa2O5NxAl capacitors formed by the anodization of sputtered TaN films were investigated. The changes in capacitance, dielectric loss, temperature coefficient of capacitance and leakage currents were studied for samples containing different concentrations of nitrogen. The results are compared with data reported by other investigators and a suitable nitrogen doping level is suggested for the fabrication of capacitors that satisfy the requirements of hybrid integrated circuits. © 1979.

引用

收藏

页码：71 / 76

页数：6

相关论文

共 9 条

[1] THIN-FILM CAPACITORS MADE FROM TAN FILMS [J].

DOKEN, M ;

OHWADA, K ;

OKAMOTO, S ;

KAMEI, T .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1978, 1 (02) :187-191

[2]

GESTENBERG D, 1966, J ELECTROCHEM SOC, V113, P542

[3] PHOTOELECTRIC DETECTION OF CHANGES IN THIN INSULATING FILMS CAUSED BY EVAPORATION OF A METAL ELECTRODE [J].

HARTL, M .

SOLID-STATE ELECTRONICS, 1969, 12 (12) :1002-&

[4] EFFECT OF LIGHT ELEMENTS (N,C,O) IN TANTALUM ON TANTALUM FILM CAPACITOR PROPERTIES [J].

HUTTEMANN, RD ;

MORABITO, JM ;

GERSTENBERG, D .

IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING, 1975, PH11 (01) :67-72

[5] IMPROVED THIN-FILM AL2O3 CAPACITORS [J].

RAO, MK ;

JAWALEKAR, SR .

THIN SOLID FILMS, 1978, 51 (02) :185-188

[6] TANTALUM FILM CAPACITORS WITH IMPROVED AC PROPERTIES [J].

ROTTERSMAN, MH ;

BILL, MJ ;

GERSTENBERG, D .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1978, 1 (02) :137-142

[7] HEAT-TREATMENT OF ANODIC OXIDE FILMS ON TANTALUM .1. THE EFFECTS ON DIELECTRIC PROPERTIES [J].

SMYTH, DM ;

SHIRN, GA ;

TRIPP, TB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (12) :1264-1271

[8]

WESTWOOD WD, 1975, TANTALUM THIN FILMS, P324

[9]

YAMAZAKI J, 1971, FUJITISU SCI TECH J, V7, P135