REAL-TIME DISPLACEMENT MEASUREMENT IN SINUSOIDAL PHASE MODULATING INTERFEROMETRY

被引：39

作者：

SUZUKI, T

SASAKI, O

HIGUCHI, K

MARUYAMA, T

机构：

来源：

APPLIED OPTICS | 1989年 / 28卷 / 24期

关键词：

D O I：

10.1364/AO.28.005270

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：5270 / 5274

页数：5

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