ELECTRON TRAPPING IN IRRADIATED SIMOX BURIED OXIDES

被引:38
作者
OUISSE, T [1 ]
CRISTOLOVEANU, S [1 ]
BOREL, G [1 ]
机构
[1] INST NATL POLYTECH GRENOBLE,ECOLE NATL SUPER ELECTR & RADIOELECT GRENOBLE,CNRS,F-38016 GRENOBLE,FRANCE
关键词
D O I
10.1109/55.82071
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The presence of numerous electron traps in the buried oxide may dominate the back-gate threshold voltage shift of strongly irradiated SIMOX transistors. A rebound effect occurs under a negative oxide field, due to the trapping of negative charges rather than to interface states generation. Irradiated transistors also show an increased sensitivity to hot-carrier effects.
引用
收藏
页码:312 / 314
页数:3
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