KINETICS OF HYDROGEN ADSORPTION AND ABSORPTION - CATALYTIC GATE MIS GAS SENSORS ON SILICON

被引：23

作者：

HUGHES, RC

TAYLOR, PA

RICCO, AJ

RYE, RR

机构：

来源：

关键词：

D O I：

10.1149/1.2097536

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2653 / 2661

页数：9

共 21 条

[1] ADAMSON AW, 1982, PHYSICAL CHEM SURFAC, P521
[2] AUER W, 1974, BER BUNSEN PHYS CHEM, V78, P58
[3] A HYDROGEN PLASMA DIAGNOSTIC BASED ON PD METAL-OXIDE-SEMICONDUCTOR DIODES
BASTASZ, R
HUGHES, RC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 629 - 630
[4] EVIDENCE FOR SUBSURFACE HYDROGEN ON PD(110) - AN INTERMEDIATE BETWEEN CHEMISORBED AND DISSOLVED SPECIES
BEHM, RJ
PENKA, V
CATTANIA, MG
CHRISTMANN, K
ERTL, G
[J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 78 (12) : 7486 - 7490
[5] ADSORPTION OF HYDROGEN ON PD(100)
BEHM, RJ
CHRISTMANN, K
ERTL, G
[J]. SURFACE SCIENCE, 1980, 99 (02) : 320 - 340
[6] CHANG SC, 1986, ACS SYM SER, V309, P58
[7] SURFACE EFFECTS ON THE KINETICS OF HYDROGEN ABSORPTION BY METALS
DAVENPORT, JW
DIENES, GJ
JOHNSON, RA
[J]. PHYSICAL REVIEW B, 1982, 25 (04): : 2165 - 2174
[8] THIN-FILM PALLADIUM AND SILVER ALLOYS AND LAYERS FOR METAL-INSULATOR-SEMICONDUCTOR SENSORS
HUGHES, RC
SCHUBERT, WK
ZIPPERIAN, TE
RODRIGUEZ, JL
PLUT, TA
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) : 1074 - 1083
[9] KINETICS OF HYDROGEN ABSORPTION BY PD(110)
KAY, BD
PEDEN, CHF
GOODMAN, DW
[J]. PHYSICAL REVIEW B, 1986, 34 (02): : 817 - 821
[10] KERMATI B, 1982, J APPL PHYS, V53, P1091