REACTIONS AT THE AL/SIO2/SIC LAYERED INTERFACE

被引:47
作者
HUGHES, AE
HEDGES, MM
SEXTON, BA
机构
[1] Division of Materials Science and Technology, CSIRO, Clayton, 3168, Vic.
关键词
D O I
10.1007/BF01129953
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electron spectroscopy and thermodynamic modelling have been used to examine reactions at the Al/SiO2/SiC layered interfaces at 800 °C. The reactions have been examined as a function of oxide thickness. Three regimes have been isolated: (i) where there is no oxide present aluminium and SiC react to produce Al4C3 and free silicon; (ii) where there is a thin oxide present the initial products are aluminosilicates and amorphous alumina; however, once the SiO2 is consumed, Al4C3 emerges as a product; (iii) where a thick oxide is present only aluminosilicate and alumina are formed. © 1990 Chapman and Hall Ltd.
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页码:4856 / 4865
页数:10
相关论文
共 47 条
[1]   PROCESS DEPENDENCE OF THE METAL-SEMICONDUCTOR WORK FUNCTION DIFFERENCE [J].
AKINWANDE, AI ;
PLUMMER, JD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (09) :2297-2303
[2]   INTERFACES IN METAL MATRIX COMPOSITES [J].
ARSENAULT, RJ ;
PANDE, CS .
SCRIPTA METALLURGICA, 1984, 18 (10) :1131-1134
[3]   PROCESSING OF PRESSURELESS-SINTERED SIC WHISKER-REINFORCED AL2O3 COMPOSITES [J].
BARCLAY, SJ ;
FOX, JR ;
BOWEN, HK .
JOURNAL OF MATERIALS SCIENCE, 1987, 22 (12) :4403-4406
[4]   AUGER AND ELECTRON ENERGY-LOSS STUDY OF THE AL/SIC INTERFACE [J].
BERMUDEZ, VM .
APPLIED PHYSICS LETTERS, 1983, 42 (01) :70-72
[5]   X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF SILICA-ALUMINA CATALYSTS USED FOR A NEW PYRIDINE SYNTHESIS [J].
BICKER, R ;
DEGER, H ;
HERZOG, W ;
RIESER, K ;
PULM, H ;
HOHLNEICHER, G ;
FREUND, HJ .
JOURNAL OF CATALYSIS, 1985, 94 (01) :69-78
[6]   PHOTOEMISSION-STUDIES OF ATOMIC REDISTRIBUTION AT GOLD-SILICON AND ALUMINUM-SILICON INTERFACES [J].
BRILLSON, LJ ;
KATNANI, AD ;
KELLY, M ;
MARGARITONDO, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :551-555
[7]   SI/SIO2 INTERFACE ROUGHNESS - STRUCTURAL OBSERVATIONS AND ELECTRICAL CONSEQUENCES [J].
CARIM, AH ;
BHATTACHARYYA, A .
APPLIED PHYSICS LETTERS, 1985, 46 (09) :872-874
[8]  
CORNIE JA, 1980, CERAM ENG SCI P, V1, P728
[9]   GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].
DEAL, BE ;
GROVE, AS .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&
[10]   CORE-LEVEL BINDING-ENERGY SHIFTS, THERMODYNAMIC PREDICTIONS, AND MORPHOLOGIES FOR METAL-SI AND METAL-GE INTERFACES [J].
DELGIUDICE, M ;
JOYCE, JJ ;
WEAVER, JH .
PHYSICAL REVIEW B, 1987, 36 (09) :4761-4768