HIGH-DOSE URANIUM ION-IMPLANTATION INTO SILICON

被引：5

作者：

BROWN, IG

GALVIN, JE

YU, KM

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 31卷 / 04期

关键词：

D O I：

10.1016/0168-583X(88)90455-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：558 / 562

页数：5

共 24 条

[1]

ALMEN O, 1961, NUCL INSTR METH, V11, P278

[2] DOSE DEPENDENCE OF 45 keV V + AND Bi + ION SPUTTERING YIELD OF COPPER. [J].

Andersen, Hans Henrik .

Radiation Effects, 1973, 19 (04) :257-261

[3] HEAVY-ION SPUTTERING YIELD OF SILICON [J].

ANDERSEN, HH ;

BAY, HL .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) :1919-1921

[4] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J].

ANDERSEN, HH ;

BAY, HL .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2416-2422

[5]

ANDERSEN HH, 1972, RADIAT EFF, V13, P67

[6] IMPROVED TIME-OF-FLIGHT ION CHARGE STATE DIAGNOSTIC [J].

BROWN, IG ;

GALVIN, JE ;

MACGILL, RA ;

WRIGHT, RT .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (09) :1589-1592

[7] HIGH-CURRENT ION-SOURCE [J].

BROWN, IG ;

GAVIN, JE ;

MACGILL, RA .

APPLIED PHYSICS LETTERS, 1985, 47 (04) :358-360

[8] METAL VAPOR VACUUM-ARC ION-SOURCE [J].

BROWN, IG ;

GALVIN, JE ;

GAVIN, BF ;

MACGILL, RA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (06) :1069-1084

[9] THE METAL VAPOR VACUUM-ARC (MEVVA) HIGH-CURRENT ION-SOURCE [J].

BROWN, IG .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1985, 32 (05) :1723-1727

[10]

BROWN IG, 1987, 1987 PART ACC C WASH

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