FE ION DOSE DEPENDENCE OF DEEP LEVELS IN SIP+-N JUNCTION

被引：10

作者：

KUMAGAI, O

KANEKO, K

机构：

来源：

关键词：

D O I：

10.1063/1.327289

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5430 / 5433

页数：4

共 12 条

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[5]

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KRYNICKI J, 1978, I PHYS C SER, V46, P48

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[8]

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MAMINE T, 1979, FEB ASTM S LIF SIL S

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