EPITAXIAL-FILMS OF WS2 BY METAL-ORGANIC VAN-DER-WAALS EPITAXY (MO-VDWE)

被引：39

作者：

TIEFENBACHER, S ^{[1
]}

SEHNERT, H ^{[1
]}

PETTENKOFER, C ^{[1
]}

JAEGERMANN, W ^{[1
]}

机构：

[1] HAHN MEITNER INST BERLIN GMBH, GRENZFLACHEN ABT, D-14109 BERLIN, GERMANY

来源：

SURFACE SCIENCE | 1994年 / 318卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(94)90331-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Epitaxial films of WS, have been grown on graphite (HOPG) by metal organic molecular beam epitaxy (MO-MBE). As precursors W(CO), and S have been used. The growth temperatures are rather high and the deposition efficiency is very low which is related to the chemical inertness of the involved van der Waals planes.

引用

页码：L1161 / L1164

页数：4

共 18 条

[1] LATTICE CONSTANTS OF GRAPHITE AT LOW TEMPERATURES [J].

BASKIN, Y ;

MEYER, L .

PHYSICAL REVIEW, 1955, 100 (02) :544-544

[2]

Bucher E., 1992, PHOTOELECTROCHEMISTR

[3] LOW-TEMPERATURE CHEMICAL PREPARATION OF SEMICONDUCTING TRANSITION-METAL CHALCOGENIDE FILMS FOR ENERGY-CONVERSION AND STORAGE, LUBRICATION AND SURFACE PROTECTION [J].

CHATZITHEODOROU, G ;

FIECHTER, S ;

KUNST, M ;

LUCK, J ;

TRIBUTSCH, H .

MATERIALS RESEARCH BULLETIN, 1988, 23 (09) :1261-1271

[4] DEPOSITION OF REFRACTORY-METAL FILMS BY RARE-GAS HALIDE LASER PHOTODISSOCIATION OF METAL-CARBONYLS [J].

FLYNN, DK ;

STEINFELD, JI ;

SETHI, DS .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (11) :3914-3917

[5] THIN-FILMS OF MOLYBDENUM AND TUNGSTEN DISULFIDES BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION [J].

HOFMANN, WK .

JOURNAL OF MATERIALS SCIENCE, 1988, 23 (11) :3981-3986

[6] ULTRASHARP INTERFACES GROWN WITH VANDERWAALS EPITAXY [J].

KOMA, A ;

YOSHIMURA, K .

SURFACE SCIENCE, 1986, 174 (1-3) :556-560

[7] VANDERWAALS EPITAXY - A NEW EPITAXIAL-GROWTH METHOD FOR A HIGHLY LATTICE-MISMATCHED SYSTEM [J].

KOMA, A .

THIN SOLID FILMS, 1992, 216 (01) :72-76

[8]

LANG O, IN PRESS J APPL PHYS

[9]

MARGARITONDO G, 1986, ELECTRONIC STRUCTURE, P399

[10] VANDERWAALS EPITAXIAL-GROWTH AND CHARACTERIZATION OF MOSE2 THIN-FILMS ON SNS2 [J].

OHUCHI, FS ;

PARKINSON, BA ;

UENO, K ;

KOMA, A .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2168-2175

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