D-METAL AND F-METAL INTERFACE FORMATION ON SILICON

被引:195
作者
ROSSI, G [1 ]
机构
[1] UNIV PARIS 11, CNRS,CEA,MEN, UTILISAT RAYONNEMENT ELECTROMAGNET LAB, F-91405 ORSAY, FRANCE
关键词
D O I
10.1016/0167-5729(87)90005-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:1 / 101
页数:101
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