SHUTTER-CONTROLLED MICROBEAM COMBINED WITH SCANNING SYSTEM FOR 2-DIMENSIONAL BACKSCATTERING IMAGES

被引：7

作者：

BAYERL, P

EICHINGER, P

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90947-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：663 / 664

页数：2

相关论文

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[2] USE OF FOCUSED ION-BEAMS FOR ANALYSIS [J].

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[3] INVESTIGATION OF LATERAL DAMAGE EFFECTS OF ION-IMPLANTED LAYERS BY BACKSCATTERING TECHNIQUES [J].

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MULLER, H ;

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