学术探索
学术期刊
新闻热点
数据分析
智能评审

APPLICATION OF TOUGAARD BACKGROUND SUBTRACTION TO AUGER-SPECTRA .2. TI AND CO SILICIDES

被引：9
作者：
BENDER, H
机构：
[1] Imec, Leuven, B-3001
来源：
SURFACE AND INTERFACE ANALYSIS | 1991年 / 17卷 / 08期
关键词：
D O I：
10.1002/sia.740170807
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The application of the Tougaard algorithm for the calculation of the inelastic background of surface electron spectra to the investigation of titanium and cobalt silicides is discussed. The differential inelastic scattering cross-section is calculated based on optical or energy loss experiments, derived from REELS spectra or approximated by the 'Universal cross-section'. The signal-to-noise ratio, the sensitivity for small peaks and the sensitivity factors are discussed.
引用
收藏
页码：584 / 592
页数：9
相关论文
共 16 条
[1]   APPLICATION OF TOUGAARD BACKGROUND SUBTRACTION TO AUGER-SPECTRA .1. SILICON, SIO2 AND SI3N4 [J].
BENDER, H .
SURFACE AND INTERFACE ANALYSIS, 1990, 15 (12) :767-774
[2]   QUANTITATIVE AES ANALYSIS OF TI SILICIDE AND CO SILICIDE FILMS [J].
CHEN, WD ;
BENDER, H ;
VANDERVORST, W ;
MAES, HE .
SURFACE AND INTERFACE ANALYSIS, 1988, 12 (1-12) :151-155
[3]  
DAVIS LE, 1976, HDB AUGER ELECTRON S
[4]  
DELPENNINO U, 1983, J PHYS C SOLID STATE, V16, P6309, DOI 10.1088/0022-3719/16/32/021
[5]  
LYNCH DW, 1975, PHYS REV B, V11, P3671
[6]   APPLICATION OF AES MICRO-ANALYSIS TO INTERFACE CHARACTERIZATION IN TI-SI DIFFUSION COUPLES .1. PHASE-ANALYSIS [J].
QUENISSET, C ;
NASLAIN, R ;
DEMONCY, P .
SURFACE AND INTERFACE ANALYSIS, 1988, 13 (2-3) :123-129
[7]   APPLICATION OF AUGER-ELECTRON SPECTROSCOPY TO STUDIES OF SILICON-SILICIDE INTERFACE [J].
ROTH, JA ;
CROWELL, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (04) :1317-1324
[8]   CHARACTERIZATION OF SI/COSI2/SI(111) HETEROSTRUCTURES USING AUGER PLASMON LOSSES [J].
SCHOWENGERDT, FD ;
LIN, TL ;
FATHAUER, RW ;
GRUNTHANER, PJ .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) :3531-3538
[9]  
Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103
[10]  
SEAH MP, 1991, IN PRESS SURF INTERF
12