APPLICATION OF TOUGAARD BACKGROUND SUBTRACTION TO AUGER-SPECTRA .1. SILICON, SIO2 AND SI3N4

被引：20

作者：

BENDER, H

机构：

[1] Imec, Leuven, B-3001

来源：

SURFACE AND INTERFACE ANALYSIS | 1990年 / 15卷 / 12期

关键词：

D O I：

10.1002/sia.740151209

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO2 and Si3N4. The influence of the different parameters, the cascade fitting and the use of calculated λ(E)K(E, T) functions or of the ‘Universal Cross‐section’ are examined in detail. It is shown that the method can be applied quite successfully for quantitative analysis when matrix corrections are considered. Copyright © 1990 John Wiley & Sons Ltd.

引用

页码：767 / 774

页数：8

共 17 条

[1] STRAGGLING AND PLASMON EXCITATION IN THE ENERGY-LOSS SPECTRA OF ELECTRONS TRANSMITTED THROUGH CARBON [J].

ASHLEY, JC ;

COWAN, JJ ;

RITCHIE, RH ;

ANDERSON, VE ;

HOELZL, J .

THIN SOLID FILMS, 1979, 60 (03) :361-370

[2] AUGER-ELECTRON SPECTROSCOPY FROM ELEMENTAL STANDARDS .1. THEORETICAL CALCULATIONS [J].

BATCHELOR, DR ;

REZ, P ;

FATHERS, DJ ;

VENABLES, JA .

SURFACE AND INTERFACE ANALYSIS, 1988, 13 (04) :193-201

[3] DAMAGE AND RECOVERY BY ELECTRON AND ION-BEAM IRRADIATION DURING AES ANALYSIS OF SILICON OXYNITRIDES [J].

BENDER, H ;

CHEN, WD .

SURFACE AND INTERFACE ANALYSIS, 1990, 15 (01) :38-46

[4]

Edwards D. F., 1985, HDB OPTICAL CONSTANT, P547

[5] INSTRUMENTAL EFFECTS IN QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY [J].

PEACOCK, DC ;

PRUTTON, M ;

ROBERTS, R .

VACUUM, 1984, 34 (05) :497-507

[6] THE SHAPE OF THE BACKGROUND IN AES - NONLINEAR FEATURES IN LOG N(E) V LOG-E [J].

PEACOCK, DC ;

DURAUD, JP .

SURFACE AND INTERFACE ANALYSIS, 1986, 8 (01) :1-6

[7]

Philipp H. R., 1985, HDB OPTICAL CONSTANT, P749, DOI 10.1016/B978-0-08-054721-3.50040-X

[8] FACTORS CONTRIBUTING TO THE SI L23VV, SI L1L23V, AND O KVV AUGER LINESHAPE IN SIO2 [J].

RAMAKER, DE ;

MURDAY, JS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :510-513

[9]

Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103

[10]

SEAH MP, 1990, IN PRESS SURF INTERF

← 1 2 →