SIZE DEPENDENCE OF MORPHOLOGY OF DIAMOND SURFACES PREPARED BY DC-ARC PLASMA-JET CHEMICAL VAPOR-DEPOSITION

被引：8

作者：

HIRABAYASHI, K ^{[1
]}

KURIHARA, NI ^{[1
]}

OHTAKE, N ^{[1
]}

YOSHIKAWA, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT MECH ENGN,MEGURO KU,TOKYO 152,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 2A期

关键词：

DIAMOND CRYSTAL; SURFACE MORPHOLOGY; DC-ARC PLASMA JET CVD; CRYSTAL GROWTH; SCANNING ELECTRON MICROSCOPE;

D O I：

10.1143/JJAP.31.355

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The size dependence of the surface morphology of a diamond crystal prepared by the dc arc plasma jet chemical vapor deposition (CVD) is observed using a high-resolution field-emission scanning electron microscope (FE-SEM). The difference in the change of the surface morphology between the {111} surface and the {100} surface is caused by the difference in the growth mode; the {111} surface is formed by the multi-nucleation growth mode, whereas the {100} surface is formed by the single nucleation growth mode.

引用

页码：355 / 360

页数：6

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