OXYGEN DISTRIBUTION PROFILES IN THIN EVAPORATED CONTACTS ON SINGLE-CRYSTAL SILICON

被引：20

作者：

PETERSSON, S ^{[1
]}

NORDE, H ^{[1
]}

POSSNERT, G ^{[1
]}

ORRE, B ^{[1
]}

机构：

[1] INST PHYS,S-75121 UPPSALA,SWEDEN

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90874-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：285 / 288

页数：4

共 12 条

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