RELATIVE ION SPUTTERING YIELD MEASUREMENTS BY INTEGRATION OF SECONDARY ION ENERGY-DISTRIBUTION USING A RETARDING-DISPERSIVE ION ENERGY ANALYZER

被引:34
作者
KRAUSS, AR [1 ]
GRUEN, DM [1 ]
机构
[1] ARGONNE NATL LAB,DIV CHEM,ARGONNE,IL 60439
来源
APPLIED PHYSICS | 1977年 / 14卷 / 01期
关键词
D O I
10.1007/BF00882637
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:89 / 97
页数:9
相关论文
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