RELATIVE ION SPUTTERING YIELD MEASUREMENTS BY INTEGRATION OF SECONDARY ION ENERGY-DISTRIBUTION USING A RETARDING-DISPERSIVE ION ENERGY ANALYZER

被引：34

作者：

KRAUSS, AR ^{[1
]}

GRUEN, DM ^{[1
]}

机构：

[1] ARGONNE NATL LAB,DIV CHEM,ARGONNE,IL 60439

来源：

APPLIED PHYSICS | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1007/BF00882637

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：89 / 97

页数：9

共 36 条

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[6] ENERGY-DISTRIBUTIONS OF NEUTRAL ATOMS AND MOLECULES SPUTTERED FROM POLYCRYSTALLINE SILVER
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[7] PROCESS OF ION FORMATION FROM ATOMS EJECTED IN HYPEREXCITED ELECTRONIC STATES FROM IONIC BOMBARDMENT OF TRANSITION METALS
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[J]. JOURNAL DE PHYSIQUE, 1970, 31 (01): : 93 - &
[8] QUADRUPOLES FOR SECONDARY ION MASS-SPECTROMETRY
DAWSON, PH
[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 17 (04): : 447 - 467
[9] ACCEPTANCE OF QUADRUPOLE MASS FILTER
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[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1975, 17 (04): : 423 - 445
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