OXIDE-FILMS ON A(III)B(V) SEMICONDUCTORS

被引：19

作者：

LOSCHKE, K

KUHN, G

BILZ, HJ

LEONHARDT, G

机构：

来源：

THIN SOLID FILMS | 1978年 / 48卷 / 02期

关键词：

D O I：

10.1016/0040-6090(78)90244-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：229 / 236

页数：8

共 14 条

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HEASELL, EL .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 27 (02) :339-346

[4] ESCA STUDIES OF SOME A-IIIB-V COMPOUNDS WITH GA AND AS [J].

LEONHARDT, G ;

BERNDTSSON, A ;

HEDMAN, J ;

KLASSON, M ;

NILSSON, R ;

NORDLING, C .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1973, 60 (01) :241-248

[5]

LOSCHKE K, UNPUBLISHED

[6]

LOSCHKE K, 1975, KRIST TECH, V10, pK45

[7] INTERPRETATION OF ELLIPSOMETRIC STUDIES ON GAP (110) SINGLE-CRYSTALS [J].

LUKES, F .

SURFACE SCIENCE, 1975, 49 (01) :344-348

[8] OXIDATION OF SI AND GAAS IN AIR AT ROOM-TEMPERATURE [J].

LUKES, F .

SURFACE SCIENCE, 1972, 30 (01) :91-&

[9] ELLIPSOMETRIC STUDIES OF CHEMISORPTION ON GAP(110) SINGLE-CRYSTALS [J].

MORGAN, AE .

SURFACE SCIENCE, 1974, 43 (01) :150-172

[10] THERMAL OXIDATION OF GAAS [J].

MURARKA, SP .

APPLIED PHYSICS LETTERS, 1975, 26 (04) :180-181

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