DETECT DENSITY-MEASUREMENTS OF LOW-TEMPERATURE-GROWN MOLECULAR-BEAM EPITAXIAL GAAS BY PHOTOTHERMAL DEFECTION SPECTROSCOPY

被引:16
作者
CHAN, MH
SO, SK
CHAN, KT
KELLERT, FG
机构
[1] HONG KONG BAPTIST UNIV,DEPT PHYS,KOWLOON,HONG KONG
[2] CHINESE UNIV HONG KONG,DEPT ELECTR ENGN,SHA TIN,HONG KONG
[3] HEWLETT PACKARD CORP,DIV MICROWAVE TECHNOL,SANTA ROSA,CA 95403
关键词
D O I
10.1063/1.115459
中图分类号
O59 [应用物理学];
学科分类号
摘要
The subgap optical absorption of GaAs layers grown by low temperature molecular beam epitaxy is measured by photothermal deflection spectroscopy (PDS). The absorption increases as the growth temperature decreases at a fixed wavelength. Defect densities evaluated from the absorption spectra and the known absorption cross sections are between 10(18) and 10(19) cm(-3). It is shown that complementary PDS phase spectra can be used to separate the absorption of the epitaxial layers from the bulk. (C) 1995 American Institute of Physics.
引用
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页码:834 / 836
页数:3
相关论文
共 23 条
[1]  
AMER NM, 1984, SEMICONDUCT SEMIMET, V21, P83
[2]   FULL-WAFER MAPPING OF TOTAL AND IONIZED EL2 CONCENTRATION IN SEMI-INSULATING GAAS USING INFRARED-ABSORPTION [J].
BRIERLEY, SK ;
LEHR, DS .
APPLIED PHYSICS LETTERS, 1989, 55 (23) :2426-2428
[3]  
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[4]   PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND DETECTION [J].
JACKSON, WB ;
AMER, NM ;
BOCCARA, AC ;
FOURNIER, D .
APPLIED OPTICS, 1981, 20 (08) :1333-1344
[5]   STOICHIOMETRY-RELATED DEFECTS IN GAAS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURES [J].
KAMINSKA, M ;
WEBER, ER ;
LILIENTALWEBER, Z ;
LEON, R ;
REK, ZU .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04) :710-713
[6]   ARSENIC ANTISITE-RELATED DEFECTS IN LOW-TEMPERATURE MBE GROWN GAAS [J].
KRAMBROCK, K ;
LINDE, M ;
SPAETH, JM ;
LOOK, DC ;
BLISS, D ;
WALUKIEWICZ, W .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1992, 7 (08) :1037-1041
[7]   NATIVE DONORS AND ACCEPTORS IN MOLECULAR-BEAM EPITAXIAL GAAS GROWN AT 200-DEGREES-C [J].
LOOK, DC ;
WALTERS, DC ;
MIER, M ;
STUTZ, CE ;
BRIERLEY, SK .
APPLIED PHYSICS LETTERS, 1992, 60 (23) :2900-2902
[8]   ANOMALOUS HALL-EFFECT RESULTS IN LOW-TEMPERATURE MOLECULAR-BEAM-EPITAXIAL GAAS - HOPPING IN A DENSE EL2-LIKE BAND [J].
LOOK, DC ;
WALTERS, DC ;
MANASREH, MO ;
SIZELOVE, JR ;
STUTZ, CE ;
EVANS, KR .
PHYSICAL REVIEW B, 1990, 42 (06) :3578-3581
[9]   MOLECULAR-BEAM EPITAXIAL GAAS GROWN AT LOW-TEMPERATURES [J].
LOOK, DC .
THIN SOLID FILMS, 1993, 231 (1-2) :61-73
[10]   ANNEALING DYNAMICS OF MOLECULAR-BEAM EPITAXIAL GAAS GROWN AT 200-DEGREES-C [J].
LOOK, DC ;
WALTERS, DC ;
ROBINSON, GD ;
SIZELOVE, JR ;
MIER, MG ;
STUTZ, CE .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (01) :306-310