FULL-WAFER MAPPING OF TOTAL AND IONIZED EL2 CONCENTRATION IN SEMI-INSULATING GAAS USING INFRARED-ABSORPTION

被引:19
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BRIERLEY, SK
LEHR, DS
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10.1063/1.102015
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O59 [应用物理学];
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页码:2426 / 2428
页数:3
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