NONCONTACT DOPING LEVEL DETERMINATION IN GAAS USING PHOTOREFLECTANCE SPECTROSCOPY - COMMENT

被引:1
作者
BOTTKA, N
GASKILL, DK
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10.1063/1.341293
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O59 [应用物理学];
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页码:4243 / 4244
页数:2
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共 6 条
[1]   THIRD-DERIVATIVE MODULATION SPECTROSCOPY WITH LOW-FIELD ELECTROREFLECTANCE [J].
ASPNES, DE .
SURFACE SCIENCE, 1973, 37 (01) :418-442
[2]   INFLUENCE OF SPATIALLY DEPENDENT PERTURBATIONS ON MODULATED REFLECTANCE AND ABSORPTION OF SOLIDS [J].
ASPNES, DE ;
FROVA, A .
SOLID STATE COMMUNICATIONS, 1969, 7 (01) :155-159
[3]   SCHOTTKY-BARRIER ELECTROREFLECTANCE-APPLICATION TO GAAS [J].
ASPNNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW B, 1973, 7 (10) :4605-4652
[4]   MODULATION SPECTROSCOPY AS A TOOL FOR ELECTRONIC MATERIAL CHARACTERIZATION [J].
BOTTKA, N ;
GASKILL, DK ;
SILLMON, RS ;
HENRY, R ;
GLOSSER, R .
JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (02) :161-170
[5]  
GLOSSER R, 1987, SPIE, V794, P14
[6]   NONCONTACT DOPING LEVEL DETERMINATION IN GAAS USING PHOTOREFLECTANCE SPECTROSCOPY [J].
PETERS, L ;
PHANEUF, L ;
KAPITAN, LW .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4558-4562