NONCONTACT DOPING LEVEL DETERMINATION IN GAAS USING PHOTOREFLECTANCE SPECTROSCOPY

被引：39

作者：

PETERS, L ^{[1
]}

PHANEUF, L ^{[1
]}

KAPITAN, LW ^{[1
]}

机构：

[1] WRIGHT STATE UNIV,RES CTR,DAYTON,OH 45435

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 11期

关键词：

D O I：

10.1063/1.339050

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4558 / 4562

页数：5

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