RAPID CRYSTALLIZATION OF THIN SOLID FILMS

被引:13
作者
VANDERPOEL, CJ [1 ]
机构
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
关键词
D O I
10.1557/JMR.1988.0126
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:126 / 132
页数:7
相关论文
共 18 条
[1]  
AMBRAMOWITZ M, 1972, HDB MATH FUNCTIONS, P486
[2]   Granulation, Phase Change, and Microstructure - Kinetics of Phase Change. III [J].
Avrami, M .
JOURNAL OF CHEMICAL PHYSICS, 1941, 9 (02) :177-184
[3]  
BOUWHUIS G, 1983, APPL OPT ELECTR ENG, V9, P73
[4]  
CARSLAW HS, 1980, CONDUCTION HEAT SOLI, P18
[5]   ASYMPTOTIC ESTIMATES OF DIFFUSION TIMES FOR RAPID THERMAL ANNEALING [J].
FEHRIBACH, JD ;
GHEZ, R ;
OEHRLEIN, GS .
APPLIED PHYSICS LETTERS, 1985, 46 (04) :433-435
[7]  
HEAVENS OS, 1965, OPTICAL PROPERTIES T, P46
[8]   THE TEMPERATURE-DEPENDENCE OF THE REFRACTIVE-INDEX OF SILICON AT ELEVATED-TEMPERATURES AT SEVERAL LASER WAVELENGTHS [J].
JELLISON, GE ;
BURKE, HH .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :841-843
[9]   SUPERHEATING OF THIN-FILMS FOR OPTICAL-RECORDING [J].
KIVITS, P ;
DEBONT, R ;
ZALM, P .
APPLIED PHYSICS, 1981, 24 (03) :273-278
[10]  
OLSON GL, 1983, MATER RES SOC S P, V13, P141