X-RAY DYNAMICAL DIFFRACTION EFFECTS OF OXIDE FILMS ON SILICON SUBSTRATES

被引：8

作者：

PATEL, JR

KATO, N

机构：

来源：

APPLIED PHYSICS LETTERS | 1968年 / 13卷 / 01期

关键词：

D O I：

10.1063/1.1652450

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：40 / &

共 13 条

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ANDO, Y ;

KATO, N .

ACTA CRYSTALLOGRAPHICA, 1966, 21 :284-&

[2] ENHANCED X-RAY DIFFRACTION FROM SUBSTRATE CRYSTALS CONTAINING DISCONTINUOUS SURFACE FILMS [J].

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MEIERAN, ES .

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SCHLEGEL, WA .

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[4] PENDELLOSUNG FRINGES IN DISTORTED CRYSTALS .1. FERMATS PRINCIPLE FOR BLOCH WAVES [J].

KATO, N .

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[5] A THEORETICAL STUDY OF PENDELLOSUNG FRINGES .2. DETAILED DISCUSSION BASED UPON A SPHERICAL WAVE THEORY [J].

KATO, N .

ACTA CRYSTALLOGRAPHICA, 1961, 14 (06) :627-&

[6] PENDELLOSUNG FRINGES IN DISTORTED CRYSTALS .3. APPLICATION TO HOMOGENEOUSLY BENT CRYSTALS [J].

KATO, N .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1964, 19 (06) :971-&

[7] PENDELLOSUNG FRINGES IN DISTORTED CRYSTALS .2. APPLICATION TO 2-BEAM CASES [J].

KATO, N .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1964, 19 (01) :67-&

[8]

KATO N, COMPUTER CALCULATION

[9] THE PROJECTION TOPOGRAPH - A NEW METHOD IN X-RAY DIFFRACTION MICRORADIOGRAPHY [J].

LANG, AR .

ACTA CRYSTALLOGRAPHICA, 1959, 12 (03) :249-250

[10] IMPURITY CLUSTERING EFFECTS ON ANOMALOUS TRANSMISSION OF X RAY IN SILICON [J].

PATEL, JR ;

BATTERMAN, BW .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (09) :2716-&

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