CATALYTIC METALS AND FIELD-EFFECT DEVICES - A USEFUL COMBINATION

被引：97

作者：

LUNDSTROM, I

SPETZ, A

WINQUIST, F

ACKELID, U

SUNDGREN, H

机构：

[1] Laboratory of Applied Physics, Linköping University

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1990年 / 1卷 / 1-6期

关键词：

D O I：

10.1016/0925-4005(90)80164-U

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The properties of gas-sensitive field-effect devices with catalytic metal gates are described. We demonstrate especially how the selectivity of these sensors depends on parameters such as the choice of catalytic metal, the structure of the catalytic metal film and the operation temperature of the device. The sensitivity towards molecules like hydrogen, ammonia, ethanol and ethylene is demonstrated. The selectivity pattern of devices with catalytic metal gates is discussed in relation to the fabrication of multisensor arrays and the development of 'artificial olfactory senses'. © 1990.

引用

页码：15 / 20

页数：6

共 14 条

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[8] LUNDSTROM I, 1986, 2ND P INT M CHEM SEN, P387
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[10] HYDROGEN AND AMMONIA RESPONSE OF METAL-SILICON DIOXIDE-SILICON STRUCTURES WITH THIN PLATINUM GATES
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[J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) : 1274 - 1283

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