THE FABRICATION OF AMORPHOUS SIO2 SUBSTRATES SUITABLE FOR TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF ULTRATHIN POLYCRYSTALLINE FILMS

被引：34

作者：

ENQUIST, F

SPETZ, A

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(86)90256-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：99 / 104

页数：6

共 6 条

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[3]

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[6]

WINQUIST F, 1986, SENS ACTUATORS, V8, P91