MEASUREMENT OF KNIFE-EDGE RESPONSES OF A SCHWARZSCHILD X-RAY OBJECTIVE

被引：9

作者：

IKETAKI, Y

HORIKAWA, Y

NAGAI, K

MOCHIMARU, S

OHTA, Y

KAMIJOU, H

SHIBUYA, M

机构：

[1] OLYMPUS OPT CO LTD,BASIC RES LAB,HACHIOJI,TOKYO 192,JAPAN

[2] OLYMPUS OPT CO LTD,DIV PROD ENGN,KAMIINA,NAGANO 39904,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 04期

关键词：

SCHWARZSCHILD OBJECTIVE; KNIFE-EDGE METHOD; RAY TRACING; LASER-PRODUCED PLASMA; X-RAY OPTICAL SYSTEM;

D O I：

10.1143/JJAP.32.1837

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The spatial resolution of a Schwarzschild objective was evaluated at the wavelength of 135 angstrom by means of an apparatus constructed using the knife-edge method which is suitable to the measurement of higher resolution. The knife-edge response of the objective was measured with the apparatus. Then the results were compared with the theoretical responses calculated using ray tracing. It is found that the measured responses of the objective are almost the same as the theoretical ones. We conclude that the objective has the spatial resolution of 0.2 mum.

引用

页码：1837 / 1841

页数：5

共 9 条

[1] SOFT-X-RAY PROJECTION LITHOGRAPHY - PRINTING OF 0.2-MU-M FEATURES USING A 20-1 REDUCTION [J].

BERREMAN, DW ;

BJORKHOLM, JE ;

EICHNER, L ;

FREEMAN, RR ;

JEWELL, TE ;

MANSFIELD, WM ;

MACDOWELL, AA ;

OMALLEY, ML ;

RAAB, EL ;

SILFVAST, WT ;

SZETO, LH ;

TENNANT, DM ;

WASKIEWICZ, WK ;

WHITE, DL ;

WINDT, DL ;

WOOD, OR ;

BRUNING, JH .

OPTICS LETTERS, 1990, 15 (10) :529-531

[2]

ERDOS P, 1959, J OPT SOC AM, V149, P877

[3]

GERRITSEN HC, 1986, J APPL PHYS, V59, P2237

[4]

HORIKAWA Y, 1992, UNPUB P SPIE, V1720

[5]

KADO M, 1988, JPN J OPT, V17, P234

[6] SOFT-X-RAY REDUCTION LITHOGRAPHY USING MULTILAYER MIRRORS [J].

KINOSHITA, H ;

KURIHARA, K ;

ISHII, Y ;

TORII, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06) :1648-1651

[7]

MASUI S, 1992, UNPUB P SPIE, V1741

[8] ATOMIC-NUMBER DEPENDENCE OF SOFT-X-RAY EMISSION FROM VARIOUS TARGETS IRRADIATED BY A 0.53-MU-M-WAVELENGTH LASER [J].

MOCHIZUKI, T ;

YABE, T ;

OKADA, K ;

HAMADA, M ;

IKEDA, N ;

KIYOKAWA, S ;

YAMANAKA, C .

PHYSICAL REVIEW A, 1986, 33 (01) :525-539

[9] COMPACT SCANNING SOFT-X-RAY MICROSCOPE USING A LASER-PRODUCED PLASMA SOURCE AND NORMAL-INCIDENCE MULTILAYER MIRRORS [J].

TRAIL, JA ;

BYER, RL .

OPTICS LETTERS, 1989, 14 (11) :539-541

← 1 →