ELECTRON-ENERGY-LOSS CHARACTERIZATION OF LASER-DEPOSITED AC, A-CH, AND DIAMOND FILMS

被引:125
作者
KOVARIK, P
BOURDON, EBD
PRINCE, RH
机构
[1] Department of Physics and Astronomy, York University, Toronto, Ont.
来源
PHYSICAL REVIEW B | 1993年 / 48卷 / 16期
关键词
D O I
10.1103/PhysRevB.48.12123
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electron-energy-loss spectroscopy has been used to identify microcrystalline diamond films produced by laser ablation of graphite. The production of the diamond phase results from varying the deposition geometry and parameters from those of an earlier configuration that produced diamondlike carbon films. A complete study of these crystalline and amorphous materials indicates a plasmon energy variation for films produced in different environments. Spectra taken with different primary energies show variation in the plasmon energy in hydrogenated carbon films. These changes were interpreted as a variation in the bonding nature of the sample with depth. The spectra of all samples were analyzed to determine sp2/sp2+sp3 fraction, dielectric functions, and optical band gap.
引用
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页码:12123 / 12129
页数:7
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