BIS(PERFLUOROPHENYL) AZIDES - EFFICIENT CROSS-LINKING AGENTS FOR DEEP-UV AND ELECTRON-BEAM LITHOGRAPHY

被引：28

作者：

CAI, SX

NABITY, JC

WYBOURNE, MN

KEANA, JFW

机构：

[1] UNIV OREGON,DEPT CHEM,EUGENE,OR 97403

[2] UNIV OREGON,DEPT PHYS,EUGENE,OR 97403

来源：

关键词：

D O I：

10.1021/cm00012a004

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：631 / 633

页数：3

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