ELECTRICAL AND OPTICAL-PROPERTIES OF SPRAYED SNO2 FILMS - DEPENDENCE ON THE OXIDIZING-AGENT IN THE STARTING MATERIAL

被引：44

作者：

VASU, V

SUBRAHMANYAM, A

机构：

[1] Department of Physics, Indian Institute of Technology, Madras

来源：

THIN SOLID FILMS | 1990年 / 193卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(90)90252-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tin oxide (SnO2) thin films are prepared on soda-line glass substrates by a spray pyrolysis technique using anhydrous and pentahydrate (SnCl4.5H2)) tin chloride as starting materials. Electrical and optical properties and X-ray diffraction studies of these films as a function of substrate temperature (553-713 K) are reported. It is observed that there are differences in the properties of these films: the growth rate of SnO2 films prepared from SnCl4.5H2O is observed to be higher and the sheet resistance is lower in comparison with those of films prepared from anhydrous SnCl4. The differences in the physical properties are attributed to the water molecules in the starting material.

引用

页码：973 / 980

页数：8

共 14 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF REACTIVELY EVAPORATED INDIUM TIN OXIDE (ITO) FILMS - DEPENDENCE ON SUBSTRATE-TEMPERATURE AND TIN CONCENTRATION [J].