PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF C-AXIS ORIENTED AND EPITAXIAL-FILMS OF ZNO AT LOW SUBSTRATE TEMPERATURES

被引：40

作者：

SHIOSAKI, T

YAMAMOTO, T

YAGI, M

KAWABATA, A

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 05期

关键词：

D O I：

10.1063/1.92751

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：399 / 401

页数：3

相关论文

共 9 条

[1] HIGHLY ORIENTED ZINC-OXIDE FILMS GROWN BY THE OXIDATION OF DIETHYLZINC
GHANDHI, SK
FIELD, RJ
SHEALY, JR
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (05) : 449 - 451
[2] HICKERNELL FS, 1980, P IEEE ULTRASONICS S, P785
[3] EPITAXIAL-GROWTH OF ZNO FILMS BY VAPOR TRANSPORT IN AN OPEN TUBE SYSTEM
KASUGA, M
ISHIHARA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (09) : 1835 - 1836
[4] RF DIODE SPUTTERED ZNO TRANSDUCERS
LARSON, JD
WINSLOW, DK
ZITELLI, LT
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1972, SU19 (01): : 18 - &
[5] LAW CK, 1980, J ELECTROCHEM SOC, V127, P1843
[6] CHEMICAL VAPOR-DEPOSITION OF SINGLE-CRYSTALLINE ZNO FILM WITH SMOOTH SURFACE ON INTERMEDIATELY SPUTTERED ZNO THIN-FILM ON SAPPHIRE
OHNISHI, S
HIROKAWA, Y
SHIOSAKI, T
KAWABATA, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (05) : 773 - 778
[7] OPTICAL-PROPERTIES OF SINGLE-CRYSTALLINE ZNO FILM SMOOTHLY CHEMICAL-VAPOR DEPOSITED ON INTERMEDIATELY SPUTTERED THIN ZNO FILM ON SAPPHIRE
SHIOSAKI, T
OHNISHI, S
KAWABATA, A
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3113 - 3117
[8] SHIOSAKI T, 1978, P IEEE ULTRASON S, P100
[9] CHEMICAL VAPOR-DEPOSITION OF ZNO EPITAXIAL-FILMS ON SAPPHIRE
TIKU, SK
LAU, CK
LAKIN, KM
[J]. APPLIED PHYSICS LETTERS, 1980, 36 (04) : 318 - 320