CHEMICAL VAPOR-DEPOSITION OF ZNO EPITAXIAL-FILMS ON SAPPHIRE

被引：20

作者：

TIKU, SK ^{[1
]}

LAU, CK ^{[1
]}

LAKIN, KM ^{[1
]}

机构：

[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90007

来源：

关键词：

D O I：

10.1063/1.91477

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：318 / 320

页数：3

共 10 条

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[2] EPITAXIAL ZNO ON SAPPHIRE
GALLI, G
COKER, JE
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (11) : 439 - &
[3] LAKIN KM, 1971, IEEE ULTRASONICS S M
[4] CHEMICAL VAPOR-DEPOSITION OF SINGLE-CRYSTALLINE ZNO FILM WITH SMOOTH SURFACE ON INTERMEDIATELY SPUTTERED ZNO THIN-FILM ON SAPPHIRE
OHNISHI, S
HIROKAWA, Y
SHIOSAKI, T
KAWABATA, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (05) : 773 - 778
[5] RF SPUTTERED EPITAXIAL ZNO FILMS ON SAPPHIRE FOR INTEGRATED-OPTICS
PARADIS, EL
SHUSKUS, AJ
[J]. THIN SOLID FILMS, 1976, 38 (02) : 131 - 141
[6] INVESTIGATION OF SURFACE ACOUSTIC-WAVE PROPERTIES OF HETEROEPITAXIAL ZNO LAYERS ON AL2O3
PIZZARELLO, F
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) : 3627 - +
[7] Reisman A., 1973, Journal of Electronic Materials, V2, P177, DOI 10.1007/BF02666151
[8] Reisman A., 1972, J ELECTRON MATER, V1, P395, DOI [10.1007/BF02659165, DOI 10.1007/BF02659165]
[9] Shiosaki T., 1978, IEEE ULTRASONICS S P, P100
[10] SMITH HI, 1977, SURFACE WAVE FILTERS