THERMAL-STABILITY OF DOPANT-HYDROGEN PAIRS IN GAAS

被引:64
作者
PEARTON, SJ
ABERNATHY, CR
LOPATA, J
机构
关键词
D O I
10.1063/1.105635
中图分类号
O59 [应用物理学];
学科分类号
摘要
The thermal stability of dopant-hydrogen complexes in hydrogenated n- and p-type GaAs(1-2 X 10(17) cm-3) has been determined by examining their reactivation kinetics in reverse-biased Schottky diodes. The reactivation process is first-order for all of the dopants, with thermal dissociation energies (E(D)) of 1.45 +/- 0.10 eV for Si(As) acceptors, 1.25 +/- 0.05 eV for Si(Ga) donors, 1.20 +/- 0.10 eV for Sn(Ga) donors, 1.25 +/- 0.10 eV for Zn acceptors, 1.35 +/- 0.05 eV for C(As) acceptors, and 1.15 +/- 0.10 eV for Be acceptors. The dissociation frequencies (v) are thermally activated of the form nu(D) = nu-0E(-ED/kT), with the nu-0 values in the range 1-5 X 10(13) s-1. The results are consistent with much of the H being present as H+ in p-type material, and H- in n-type material.
引用
收藏
页码:3571 / 3573
页数:3
相关论文
共 31 条
  • [1] CARBON DOPING OF III-V-COMPOUNDS GROWN BY MOMBE
    ABERNATHY, CR
    PEARTON, SJ
    REN, F
    HOBSON, WS
    FULLOWAN, TR
    KATZ, A
    JORDAN, AS
    KOVALCHICK, J
    [J]. JOURNAL OF CRYSTAL GROWTH, 1990, 105 (1-4) : 375 - 382
  • [2] [Anonymous], 1991, HYDROGEN SEMICONDUCT
  • [3] DONOR-HYDROGEN COMPLEXES IN PASSIVATED SILICON
    BERGMAN, K
    STAVOLA, M
    PEARTON, SJ
    LOPATA, J
    [J]. PHYSICAL REVIEW B, 1988, 37 (05): : 2770 - 2773
  • [4] DONOR NEUTRALIZATION IN GAAS(SI) BY ATOMIC-HYDROGEN
    CHEVALLIER, J
    DAUTREMONTSMITH, WC
    TU, CW
    PEARTON, SJ
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 108 - 110
  • [5] CHEVALLIER J, 1991, HYDROGEN SEMICONDUCT, pCH13
  • [6] CHO HY, IN PRESS PHYS REV B
  • [7] HYDROGEN-ACCEPTOR PAIRS IN SILICON - PAIRING EFFECT ON THE HYDROGEN VIBRATIONAL FREQUENCY
    DELEO, GG
    FOWLER, WB
    [J]. PHYSICAL REVIEW B, 1985, 31 (10): : 6861 - 6864
  • [8] HYDROGEN IN PHOSPHORUS-DOPED AND CARBON-DOPED CRYSTALLINE SILICON
    ENDROS, AL
    KRUHLER, W
    GRABMAIER, J
    [J]. PHYSICA B, 1991, 170 (1-4): : 365 - 370
  • [9] INTERSTITIAL HYDROGEN AND NEUTRALIZATION OF SHALLOW-DONOR IMPURITIES IN SINGLE-CRYSTAL SILICON
    JOHNSON, NM
    HERRING, C
    CHADI, DJ
    [J]. PHYSICAL REVIEW LETTERS, 1986, 56 (07) : 769 - 772
  • [10] HYDROGEN PASSIVATION OF SHALLOW-ACCEPTOR IMPURITIES IN PARA-TYPE GAAS
    JOHNSON, NM
    BURNHAM, RD
    STREET, RA
    THORNTON, RL
    [J]. PHYSICAL REVIEW B, 1986, 33 (02): : 1102 - 1105