PHOTOELECTRON-SPECTRA AND MOLECULAR-PROPERTIES .131. C(SIH3)4, HC(SIH3)3 AND (H3C)HC(SIH3)2

被引:5
作者
BOCK, H [1 ]
KREMER, M [1 ]
SCHMIDBAUR, H [1 ]
机构
[1] TECH UNIV MUNICH,INST ANORGAN CHEM,W-8046 GARCHING,GERMANY
关键词
D O I
10.1016/0022-328X(92)83314-8
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The compounds C(SiH3)4, HC(SiH3)3 and (H3C)HC(SiH3)2 are potential feedstock gases for the decomposition to amorphous hydrogenated silicon carbide thin films. The He(I) photoelectron spectra of the molecules are assigned both by radical cation state comparison with the homologous hydrocarbons neopentane and isobutane as well as by Koopmans' correlation with MNDO eigenvalues. The difference in effective nuclear charges, C > Si, causes distinct changes, e.g. the 2s(C) ionisations are lowered by about 2 eV. On heating in a low-pressure flow system, C(SiH3)4 at 1000 K splits off H3SiSiH3+H-2 and a brown CVD film forms on the surface of the reactor.
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页码:1 / 11
页数:11
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