共 35 条
[3]
ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1972, 9 (06)
:1385-&
[6]
FRANKLIN SE, 1992, SURF COAT TECH, V55, P459
[7]
FUKUDA K, 1985, 28TH P JPN C MAT RES, P89
[8]
FUKUDA K, 1986, 29TH P JPN C MAT RES, P99
[10]
Hedenqvist P., 1992, Surface Engineering, V8, P39