A VERTICAL PIEZOELECTRIC INERTIAL SLIDER

被引:121
作者
RENNER, C
NIEDERMANN, P
KENT, AD
FISCHER, O
机构
[1] Université de Genève, Département de Physique de la Matière Condensée, CH-1211 Genève 4
关键词
D O I
10.1063/1.1141450
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have developed a linear translation device using piezoelectric-induced slip-stick motion. Reproducible single steps of about 30 Å, as well as continuous stepping with an overall translation speed of 0.25 mm/s, are routinely realized. The notable feature of this device is that this performance is achieved in the vertical orientation with the translator moving against gravity. This remarkable result is made possible using cycloidal functions instead of sawtooth signals to activate the motion. We have realized a very simple translator which can be used in any orientation with a displacement onset voltage of 15 V. The instrument was successfully tested in the temperature range from 1.6 to 300 K. Since no mechanical connections are required, this design is well suited for many applications, including scanning tunneling microscopy.
引用
收藏
页码:965 / 967
页数:3
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