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COMPARISON OF METHODS FOR ACCURATE FILM THICKNESS MEASUREMENT

被引：17
作者：
KING, RJ
DOWNS, MJ
TALIM, SP
RAINE, KW
CLAPHAM, PB
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1972年 / 5卷 / 05期
关键词：
D O I：
10.1088/0022-3735/5/5/021
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：445 / &
相关论文
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