FILM THICKNESS MEASUREMENT BY ABSOLUTE METHODS

被引：4

作者：

GREAVES, C

机构：

来源：

VACUUM | 1970年 / 20卷 / 10期

关键词：

D O I：

10.1016/S0042-207X(70)80057-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：437 / &

共 18 条

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[2]

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[3]

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GREAVES, C .

VACUUM, 1970, 20 (08) :332-&

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GUNN, AF ;

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[7] MEASUREMENT OF THE THICKNESS OF THIN FILMS BY MULTIPLE-BEAM INTERFEROMETRY [J].

HEAVENS, OS .

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[8] ON CALCULATION OF THIN FILM REFRACTIVE INDEX AND THICKNESS BY ELLIPSOMETRY [J].

HOLMES, DA .

APPLIED OPTICS, 1967, 6 (01) :168-&

[9] STUDIES OF SURFACE FILMS BY REFLECTION OF POLARIZED LIGHT .1. A MORE RIGOROUS ALGEBRAIC METHOD FOR COMPUTING RESULTS [J].

LUCY, FA .

JOURNAL OF CHEMICAL PHYSICS, 1948, 16 (03) :167-174

[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

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