PROTON-PROTON SCATTERING AS A TOOL FOR HYDROGEN PROFILING IN THIN-FILMS FOR SEMICONDUCTOR TECHNOLOGY

被引：9

作者：

PADUSCHEK, P

EICHINGER, P

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 191卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(81)90986-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：75 / 79

页数：5

共 11 条

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